228 / 2018-09-23 15:17:05

Research on the fiber optic EFPI sensor with a beam-supported membrane structure for PD acoustic detection

fiber optic; EFPI sensor ; partial discharge; acoustic detection

In this paper, the fiber optic extrinsic Fabry-Perot interferometer (EFPI) sensor with a beam-supported membrane structure was designed and developed to detect acoustic emission (AE) signals of partial discharge (PD). Based on the MEMS processing technology, the silicon-On-Insulator (SOI) was used to fabricate the diaphragm structure of the supporting beam and control the Fabry-Perot cavity length accurately by design of the hole shoulder. Processed diaphragm and its measurement results of size parameters are given, while measurement of Fabry-Perot cavity length by surface profilometer is also shown. At last, experimental results in laboratory show that the developed EFPI sensor with a beam-supported membrane structure is feasible and practical used for PD AE detection.