Diamond-like carbon (DLC) is a promising material due to its outstanding properties. Among them, hydrogenated amorphous carbon film (a-C:H) has attracted many researchers’ interest because of its ability to achieve ultra-low friction (μ<0.01) in special environment. However, the ultra-low friction experiment of a-C:H films are mostly carried out on silicon substrate due to their low chemical affinity with metallic alloys substrates, which limits the wide use of a-C:H films in industrial application. In this work, we performed a detailed study about adhesion of a-C:H films grown on different metallic alloys by introducing adhesive Si-DLC interlayer deposited at different processing parameters. Si-DLC interlayer was introduced between a-C:H layer and substrates using ion beaming deposition. The a-C:H films with different interlayer were prepared by varying the gas flow ratio of TMS/C7H8. Nanoindentation and Nanoscratch test methods were used to evaluate the mechanical properties and adhesion of the films. X-ray photoelectron spectroscopy (XPS), Raman spectra were used to analyze the composition and the chemical structure of the films. The microstructure of the cross section was evaluated by SEM, HRTEM. The gas flow ratio of the interlayer at the interface has a great influence on the adhesion of a-C:H film. The results of Raman spectroscopy, Nano indentation and nanoscratch tests showed that the film 5 exhibited the lowest ID/IG ratio, highest hardness, and highest adhesion to the substrate. On different metallic alloys, two different failure mechanisms that took place at the outermost interface (a-C:H layer/Si-DLC interlayer) and at the innermost interface (substrate/Si-DLC interlayer). As the gas flow ratio of TMS/C₇H₈ at the outermost interface selected on1:1, film 5 shown the best mechanical and superlubricity properties.