摘要详情

ID / 提交时间

264 / 2021-11-07 22:37:32

标题

Regulation of Surface Trap Distribution on Silicone Rubber by Radio Frequency Fluorocarbon Plasma

关键字

Silicon rubber,CF4,RF capacitive coupled plasma,Surface trap distribution

主题及专题

High voltage and insulation technology > High Voltage insulation technologies

状态

终稿

作者

Wenhu Han / Xi’an Jiaotong University

Chenxu Wang / Xi’an Jiaotong University

Bo Zhang / Xi’an Jiaotong University

Yunhao Sun / Xi’an Jiaotong University

Xiong Yang / Xi’an Jiaotong University

Guanjun Zhang / Xi'an Jiaotong University

摘要

The surface trap distribution of insulating materials has a significant effect on the electrical resistance along the surface. Therefore, RF capacitive coupled plasma (CCP) was applied to modify the surface of silicone rubber in low-pressure CF₄ gas. A one-dimensional fluid model of CCP based COMSOL simulation software was established. The electron temperature, electron number density, and ion density distribution of plasma were analyzed, and the surface treatment parameters of plasma were determined. The surface morphology and chemical structure of samples were observed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The charge attenuation and the trap distribution were measured by an isothermal surface potential attenuation system. The results show that CCP treatment can introduce fluorinated groups into the surface of silicone rubber and increase the surface roughness. After CCP treatment, the surface charge attenuation of silicone rubber is inhibited and the electron trap is deepened, which is beneficial to suppress the development of secondary electron collapse on the surface and improve its electrical resistance along the surface.

重要日期

会议日期

07月11日

2023

至

08月18日

2023
11月10日 2021

初稿截稿日期
12月10日 2021

注册截止日期
12月11日 2021

报告提交截止日期

主办单位

IEEE IAS

承办单位

IEEE IAS Student Chapter of Southwest Jiaotong University (SWJTU)
IEEE IAS Student Chapter of Huazhong University of Science and Technology (HUST)
IEEE PELS (Power Electronics Society) Student Chapter of HUST