摘要详情

ID / 提交时间

47 / 2023-08-29 23:52:16

标题

Research on High-Precision and Low-Power Quartz MEMS Gyroscope Signal Demodulation Circuit Based on AFE and FPGA Fusion

关键字

MEMS gyroscope,DFT algorithm,fusion demodulation,high precision,low-power consumption

主题及专题

Special Sessions > SS03 - Sensor related circuit and system, and Artificial Intelligence Algorithm

状态

终稿

作者

Jiawei Li / College of Electronic Information and Optical Engineering, Nankai University

Xinyue Sun / College of Electronic Information and Optical Engineering, Nankai University

Yuchen Shi / College of Electronic Information and Optical Engineering, Nankai University

Yichen Ren / College of Electronic Information and Optical Engineering, Nankai University

Ergang Zhao / College of Electronic Information and Optical Engineering, Nankai University

Zhao Yue / College of Electronic Information and Optical Engineering, Nankai University；Smart Sensing Interdisciplinary Science Center of Nankai University；Tianjin Key Laboratory of Optoelectronic Sensor and Sensing Network Technology

摘要

Mainstream quartz MEMS gyroscope signal demodulation methods are coherent demodulation methods, and the sensitivity of phase limits their accuracy improvement. In order to improve the accuracy of quartz MEMS gyroscope signal demodulation and achieve low-power gyroscope signal demodulation, a high-precision and low-power quartz MEMS gyroscope signal demodulation circuit based on AFE and FPGA fusion is proposed: The FPGA circuit uses simplified non-phase-sensitive amplitude discrimination algorithm and second-order IIR low-pass filter to build demodulation circuit; The AFE circuit uses low-power single point DFT algorithm based on CORDIC algorithm for demodulation, and then performs dual circuit fusion to improve demodulation accuracy. The high-precision quartz MEMS gyroscope signal demodulation circuit is achieved with a scale factor of 6.4 mV/°/s, relative error of 1.14%, and data variance of 0.39. By detecting the rate of change in angular velocity, it switches to a single circuit to achieve low-power signal demodulation goals, the minimum operating power consumption is about 0.59mW.