The development of the fourth generation synchrotron radiation and X-ray free electron laser instrument has brought more opportunities for microscopic imaging based on high energy/high repetition rate X-ray sources, and also brought great challenges to the development of beam manipulation technology and X-ray optical elements applied to coherent hard X-rays. In order to satisfying the focusing requirements of XFEL, a simulation program based on wave optics was developed to simulate the focusing spot evolution of X-ray beam near the focusing position along the propagation direction, and a Compound Refractive Lens based on diamond single crystal was developing, and had achieved preliminary research results, which is expected to be suitable for beam line construction and experimental application of XFEL.

Compond Refractive Lens, X-ray, Focusing, Laser Processing