摘 要：TiAlTaNbN涂层具有良好的力学性能、热稳定性和抗氧化性，其性能与Ta、Nb含量密切相关。本研究采用阴极弧蒸发法制备了Ti_1-x-y-zAl_xTa_yNb_zN（0.50 ≤ x ≤ 0.53，0.02 ≤ y ≤ 0.14，0.02 ≤ z ≤ 0.12）涂层，探究了Ta和Nb含量变化对Ti_1-x-y-zAl_xTa_yNb_zN涂层微观结构、力学性能和热性能的影响。实验结果表明，Ti_0.33Al_0.53Ta_0.02Nb_0.12N、Ti_0.33Al_0.53Ta_0.03Nb_0.11N、Ti_0.33Al_0.53Ta_0.07Nb_0.07N、Ti_0.33Al_0.52Ta_0.12Nb_0.03N和Ti_0.34Al_0.50Ta_0.14Nb_0.02N涂层均为单相立方结构，硬度分别为30.3 ± 0.8 GPa、31.5 ± 0.7 GPa、30.9 ± 0.9 GPa、33.3 ± 0.6 GPa和33.7 ± 0.4 GPa。Ti_1-x-y-zAl_xTa_yNb_zN涂层的热稳定性随Ta含量上升而上升。其中Ti_0.34Al_0.50Ta_0.14Nb_0.02N涂层热稳定性最为优异，在1000 ℃退火后硬度达到峰值34.9 ± 0.8 GPa。同样，Ti_1-x-y-zAl_xTa_yNb_zN涂层的抗氧化性随Ta含量上升而上升。在1000 ℃氧化15 h后，Ti_0.33Al_0.53Ta_0.02Nb_0.12N、Ti_0.33Al_0.53Ta_0.03Nb_0.11N、Ti_0.33Al_0.53Ta_0.07Nb_0.07N、Ti_0.33Al_0.52Ta_0.12Nb_0.03N 和 Ti_0.34Al_0.50Ta_0.14Nb_0.02N涂层的氧化层厚度分别为~4.1 μm、~3.3 μm、~2.9 μm、~1.8 μm和~1.6 μm。

Ti1-x-y-zAlxTayNbzN涂层,硬度,热稳定性,抗氧化性