Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies

Post-CMOS device and system options

• Non-Von Neumann computing architecture and hardware

• Quantum computing

• Growth, assembly and device / system demonstration of carbon nanotubes, graphene, 2D dimensional materials

• Spintronics, Molecular electronics, Single electron transistors, Quantum dots

• Simulation and modeling of post-CMOS devices

• Other novel device concepts and demonstration  

Photonics, future interconnects, optoelectronic devices

• Si photonics, nanophotonics, optical interconnects,

• Novel interconnect concepts, such as photo-patternable low-k and nanoimprint of interconnect structures

• Optoelectronic al materials and devices

Organic and plastic semiconductors, flexible electronics

• Synthesis and device demonstration of novel organic semiconducting materials

• Organic electronics for RFID, LED, memory, display, photovoltaic

• Low-cost processing of organic electronics, such as solution processing and roll-to-roll processing

Other applications of semiconductor devices and processes

• Energy generation, conversation and storage devices and systems, such as solar cells, battery technology, supercapacitors

• Sensors

• MEMS, Bio-MEMS

• LEDs

• Micro-fluidics and biomedical devices

• Bio-chips  

Environmentally-friendly and energy-efficient semiconductor manufacturing

MEMS Systems and Sensor Network

• Market and technology trends of MEMS and sensor network

• System integration of MEMS devices and sensors

• Heterogeneous integration of MEMS and sensor components with processors and memory

• Sensor networks

• Wearable systems for healthcare, fitness and wellness and infotainment

• Internet of Things

• Atmospheric Particulate Matter (PM) Monitoring Systems

• MEMS and sensor data storage, processing and communication, including security and privacy

• Applications of cloud technology in MEMS and sensors

MEMS and Sensor Design

Wearables

• Blood Pressure Monitors

• Drug Delivery Devices

• Electronic Patches

• Fitness & Heart Rate Monitors

• Glucose Monitors

• Smart Eyewear (Contact Lens and Glasses)

• Smart Watches

MEMS Devices and Sensors

• Accelerometers, Gyroscopes, Microactuators

• Atmospheric Particulate Matter Sensors

• Chemical and biological sensors

• CMOS image sensors

• Humidity & temperature sensors

• Inkjets

• Microfluidics

• Microphones, Compasses, Micromirrors

• Pressure sensors

• Radio Frequency Identification (RFID)

• RF-MEMS, Optical MEMS

Materials and Process technologies

• Thin films, III-V compound semiconductors

• New functional materials

• Patterning materials

• Lithography and new patterning processes

• Deep reactive ion etching

• Wet etch, plating and CMP

• Novel materials and processes 

Emerging MEMS Devices and Sensors

• MEMS-based post-CMOS devices

• Organic MEMS and BioMEMS

• MEMS for DNA sequencing

• MEMS for drug delivery

• MEMS and sensor devices for energy harvesting, storage and delivery

• Detection and monitoring of water quality, environment and safety

Packaging, Testing and Reliability of MEMS Devices and Sensors

Applications of MEMS Devices and Sensors

• Automotive

• Smart phones

• Handheld gaming devices and consoles

• Chemical and biomedical applications

• Healthcare and wellness

• Sensor network

• Applications of MENS and sensors in energy, environment and safety